Picture of Asher - Emitech K1050X
Current status:
DOWN
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Responsibles
1st Responsible:
Ivan Maximov
Process:
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Description

Oxygen plasma ashing machine with RF-plasma excitation. Barrel type, with a Faraday cage. Installed 2005. Room Q156, Nano-process lab.

Details
Tool name:
Asher - Emitech K1050X
Area/room:
Nano-process area
Category:
Plasma processing
Manufacturer:
[Not specified]
Model:
[Not specified]
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Instructors

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Tool Modes
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