Picture of Ellipsometer, spectroscopic Woollam M2000VI
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Responsibles
1st Responsible:
Peter Blomqvist
Process:
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Description

Woollam spectroscopic ellipsometer. Installed 2006. Location: room Q154 ("Nanobar"), Nano-process lab.

Details
Tool name:
Ellipsometer, spectroscopic Woollam M2000VI
Area/room:
Nano-process area
Category:
Metrology
Manufacturer:
J.A. Woollam Co., Int
Model:
M-2000VI Spectroscopic Ellipsometer
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