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NanoLund
Chalmers
Electrum
Ångström
MyFab - The Swedish Micro and Nano Fabrication Network
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Profiler - Dektak 6M (303)
Current status:
DOWN
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Responsibles
1st Responsible:
Håkan Lapovski
Process:
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Description
Stylus profiler from Veeco Dektak 6M. Installed 2006. Location: room Q161, Nano-process lab.
Details
Tool name:
Profiler - Dektak 6M
Area/room:
Q161: UVL lab
Category:
Metrology
Manufacturer:
Veeco Instruments
Model:
Dektak 6M
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