Picture of ALD system - Savannah-100
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
Process:
Anders Kvennefors
You must be logged in to view files.

Atomic Layer Deposition system from Cambridge Nanotech. Deposition of AlOx and HfO high-k dielectric. Installed in room Q255

Tool name:
ALD system - Savannah-100
Area/room:
Q255: LEO SEM
Category:
CVD equipment
Manufacturer:
Cambridge Nanotech
Model:
Savannah 100

Instructors

Licensed Users

You must be logged in to view tool modes.