Picture of YR-Mask aligner - Karl Süss MJB 3
Current status:
DOWN
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Responsibles
1st Responsible:
Sarah McKibbin
Process:
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Description

Contact mask aligner MJB3 from Karl Suss. Samples up to 3". Soft UV (lines 365,405,433nm wavelenght). Mask size 3.5 and 4". Older completely manual version dedicated for education. Location: "Yellow room", Q237, Berzelius-lab

Details
Tool name:
YR-Mask aligner - Karl Süss MJB 3
Area/room:
Q237: YR lab
Category:
Photolithography
Manufacturer:
[Not specified]
Model:
[Not specified]
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Tool Modes
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