Picture of Moorfield Nanoetch Tool
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Process:
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Placed in room Q156, Nano-process lab.
Low power descum and residuals removal.Soft-etching technology: precision RF power (<30 W) with etch power down to 1 Wand control resolution 1 W. Parallel plate RF etcher.
 
Unprotected surfaces of the following materials are not allowed: glasses, noble metals (Au, Ag, Pt, Cu, Pd), heavy metals (Cd, Pb, Zn) and certain types of polymers (e.g. silicones).
Tool name:
Moorfield Nanoetch Tool
Area/room:
Q156: EBL room
Category:
Plasma processing
Manufacturer:
Moorfield Nanotechnology Limited
Model:
nanoETCH

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