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 NameTool IdCategory1st responsible2nd responsible
View 3D Printer Zortrax M20048Special equipmentMartin MagnussonBengt Meuller
View 4p probe Lucas Labs Pro4-4400225MetrologyAnders KvenneforsMariusz Graczyk
View Aerosol system22EpitaxyMartin MagnussonMaria Messing
View Aerotaxy G343EpitaxyMartin MagnussonBengt Meuller
View AFM - Dimension 3100301MetrologyPeter BlomqvistHåkan Lapovski
View AFM - DME C-21703MetrologyPeter BlomqvistHåkan Lapovski
View ALD - Fiji704CVD equipmentAnders KvenneforsGeorge Rydnemalm
View ALD system - Picosun Sunale R-100608CVD equipmentAnders KvenneforsGeorge Rydnemalm
View ALD system - Savannah-100606CVD equipmentAnders KvenneforsGeorge Rydnemalm
View Asher - Emitech K1050X105Plasma processingIvan MaximovIvan Maximov
View Asher - New PlasmaPreen205Plasma processingMariusz GraczykGeorge Rydnemalm
View Bonding machine - K&S 452312Packaging/wire bondingSara AtaranMariusz Graczyk
View CBE system4EpitaxySören JeppesenSören Jeppesen
View Critical Point Dryer - K850209Special equipmentDavid Fitzgerald 
View Dicer - Disco DAD 332045Dicing/scribing/polishingAnders KvenneforsGeorge Rydnemalm
View Dishwashing machine208Special equipmentGeorge RydnemalmHåkan Lapovski
View EBL - Raith 150101E-beam lithographyAnders KvenneforsDmitry Suyatin
View EBL - Voyager44E-beam lithographyAnders KvenneforsDmitry Suyatin
View Electrical measurement setup27MetrologyClaes ThelanderMalin Nilsson
View Ellipsometer, spectroscopic Woollam M2000VI302MetrologyPeter BlomqvistMariusz Graczyk
View Etcher ICP-RIE APEX - Plasma Therm112Plasma processingDmitry SuyatinPeter Blomqvist
View Etcher ICP-RIE Plasmalab - Oxford Instruments701Plasma processingDmitry SuyatinPeter Blomqvist
View Etcher RIE - Trion T2224Plasma processingDmitry SuyatinMariusz Graczyk
View Evaporator - Auto 306202EvaporationMariusz GraczykMariusz Graczyk
View Evaporator - AVAC201EvaporationDavid FitzgeraldGeorge Rydnemalm
View Evaporator - Pfeiffer Classic 500203EvaporationDavid FitzgeraldGeorge Rydnemalm
View Evaporator - UNIVEX 3003EvaporationMariusz GraczykMariusz Graczyk
View FIB - FEI NanoLab 600103Focused ion beamDmitry SuyatinAnders Kvennefors
View Fume hood Acid - YR41Wet process benchesDavid FitzgeraldMariusz Graczyk
View Fume hood acid - ALD33Wet process benchesSara AtaranGeorge Rydnemalm
View Fume hood acid - Cluster tool34Wet process benchesSara AtaranGeorge Rydnemalm
View Fume hood acid - new EBL47Wet process benchesSara AtaranIvan Maximov
View Fume hood Gold Plating - YR40Wet process benchesGeorge RydnemalmMariusz Graczyk
View Fume hood solvent - ALD32Wet process benchesSara AtaranGeorge Rydnemalm
View Fume hood spinner solvent - YR39Wet process benchesGeorge RydnemalmMariusz Graczyk
View Hall effect measurement setup15MetrologyKristian StormOlof Hultin
View Inca21ComputingJohanna MosgellerJanne Mårtensson
View Leptos23ComputingPeter BlomqvistJohanna Mosgeller
View Mask aligner - Karl Süss MJB 4 DUV305PhotolithographyMariusz GraczykAnders Kvennefors
View Mask aligner MJB4 (soft UV)316PhotolithographyMariusz GraczykAnders Kvennefors
View Micro-PL UV in Nano-lab801MetrologyPeter BlomqvistPeter Blomqvist
View Microscope - Axio Imager A1m Zeiss104MetrologySara AtaranMariusz Graczyk
View Microscope - Axio Imager M1m Zeiss207MetrologySara AtaranMariusz Graczyk
View Microscope - Axioplan Zeiss17MetrologySara AtaranMariusz Graczyk
View Microscope - Axioskop Zeiss10MetrologySara AtaranMariusz Graczyk
View Microscope - Nikon Optiphot11MetrologySara AtaranMariusz Graczyk
View MOVPE - Aixtron 200/4601EpitaxyMagnus BorgströmPeter Blomqvist
View MOVPE - Aixtron CCS (Cluster)707EpitaxySebastian LehmannKimberly Dick
View MOVPE - Epiquip5EpitaxyMagnus BorgströmPeter Blomqvist
View NIL 6 inch system - Obducat306Nanoimprint lithographyMariusz GraczykAnders Kvennefors
View Nitride epitaxy - ThomasSwan401EpitaxyZhaoxia BiPeter Blomqvist
View Off-line EBL20ComputingJanne MårtenssonJohanna Mosgeller
View Oven - EBL109Thermal processingHåkan LapovskiGeorge Rydnemalm
View Oven - EVA212Thermal processingGeorge RydnemalmHåkan Lapovski
View Oven - UVL1311Thermal processingHåkan LapovskiGeorge Rydnemalm
View Oven - UVL2312Thermal processingGeorge RydnemalmHåkan Lapovski
View Oxidation furnace35Thermal processingHåkan LapovskiMariusz Graczyk
View Ozone cleaner - UVOH 150221Special equipmentMariusz GraczykIvan Maximov
View PECVD - MicroSys 200706CVD equipmentMariusz GraczykPeter Blomqvist
View Probe station - Cascade 11000B1001MetrologyDmitry SuyatinAnders Kvennefors
View Probestation - Karl Suss42Special equipmentAnders KvenneforsMariusz Graczyk
View Profiler - Dektak 6M303MetrologyHåkan LapovskiMariusz Graczyk
View RTP system - RTP 1200-100204Thermal processingDmitry SuyatinGeorge Rydnemalm
View Safety Cabinet Mars GS 900 609Special equipmentHåkan LapovskiGeorge Rydnemalm
View Scriber - Karl Süss13Dicing/scribing/polishingMariusz GraczykMariusz Graczyk
View Scriber, manual14Dicing/scribing/polishingMariusz Graczyk 
View SEM - FEI NanoLab 600102MetrologyDmitry SuyatinAnders Kvennefors
View SEM - Hitachi SU8010705MetrologyAnders KvenneforsMariusz Graczyk
View SEM - LEO 1560607MetrologyAnders KvenneforsIvan Maximov
View Sputter - Q150T ES709SputteringGeorge RydnemalmDavid Fitzgerald
View Sputterer - AJA Orion 5206SputteringPeter BlomqvistGeorge Rydnemalm
View Tensiometer - Theta Lite708MetrologyAnders KvenneforsMariusz Graczyk
View Wet bench acid - EBL110Wet process benchesDavid FitzgeraldGeorge Rydnemalm
View Wet bench acid - EVA213Wet process benchesDavid FitzgeraldGeorge Rydnemalm
View Wet bench acid - UVL313Wet process benchesSara AtaranGeorge Rydnemalm
View Wet bench solvent - Aerotaxy37Wet process benchesSara AtaranIvan Maximov
View Wet bench solvent - EBL111Wet process benchesDavid FitzgeraldGeorge Rydnemalm
View Wet bench solvent - EVA214Wet process benchesDavid FitzgeraldGeorge Rydnemalm
View Wet bench solvent - new EBL46Wet process benchesDavid FitzgeraldIvan Maximov
View Wet bench solvent - UVL1314Wet process benchesDavid FitzgeraldGeorge Rydnemalm
View Wet bench solvent - UVL2315Wet process benchesDavid FitzgeraldGeorge Rydnemalm
View XRD - Bruker D8605MetrologyPeter BlomqvistHåkan Lapovski
View YR-Mask aligner - Karl Süss MJB 37PhotolithographyMariusz GraczykAnders Kvennefors
View YR-NIL 3 inch system - Obducat18Nanoimprint lithographyMariusz GraczykMariusz Graczyk
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