Picture of SEM - GeminiSEM 500
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Shottky FEG type SEM, model GeminSEM 500 from Zeiss.

The tool is mainly for analytical work such as EDS, EBSD and correlative light microscopy. 

The tool is fitted with the following extra detectors:

-EDS

-EBSD

-BSD (6 segment detector)

-STEM

Location: Q260

Tool name:
SEM - GeminiSEM 500
Area/room:
Q260: Hitach and Zeiss SEM
Category:
Metrology
Manufacturer:
Zeiss
Model:
GeminiSEM 500

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