Picture of Oven - EBL
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AVAILABLE
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Oven for baking of e-beam and UV-sensitive resists. Location: EBL-room, NANO-process lab.

Tool name:
Oven - EBL
Area/room:
Q156: EBL room
Category:
Thermal processing
Manufacturer:
Salvis LA from L.A.B. Sweden
Model:
TC40 with exhaust adapter

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