Picture of Wet bench solvent - EBL
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Natalia Volkova
Process:
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Description

Wet bench for solvent use, spin-coating of e-beam resists, Nano-process, EBL-lab, room Q156

Details
Tool name:
Wet bench solvent - EBL
Area/room:
Q156: EBL room
Category:
Wet process benches
Manufacturer:
[Not specified]
Model:
[Not specified]
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