Picture of Evaporator - Pfeiffer Classic 500
Current status:
DOWN
Book | Log| 
Show/Collapse all

Responsibles
1st Responsible:
David Fitzgerald
Process:
Files
You must be logged in to view files.
Description

Thermal evaporation of Au, Ag, Al, Ni, Ti, Si and Cr sublimation. Substrates up to 4". Front evaporation only. Base pressure below 5*10-7mbar. Location: room Q156, NANO-process lab.

Details
Tool name:
Evaporator - Pfeiffer Classic 500
Area/room:
Nano-process area
Category:
Evaporation
Manufacturer:
[Not specified]
Model:
[Not specified]
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
You must be logged in to view tool modes.