Picture of MOVPE - Epiquip
Current status:
AVAILABLE
Book | Log| 
Show/Collapse all

Responsibles
1st Responsible:
Magnus Borgström
Process:
Files
You must be logged in to view files.
Description

MOVPE system for III-V growth. Arsenides and Phosphides. Location: room Q248.

Details
Tool name:
MOVPE - Epiquip
Area/room:
Q248: Epiquip
Category:
Epitaxy
Manufacturer:
EpiQuip, Epigress
Model:
VP502
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
You must be logged in to view tool modes.