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Nitride epitaxy - ThomasSwan (401)
Current status:
AVAILABLE
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1st Responsible:
Luke Hankin
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Description
Nitride epitaxy system, Location: Q252
Details
Tool name:
Nitride epitaxy - ThomasSwan
Area/room:
Q252: Thomas Swan
Category:
Epitaxy
Manufacturer:
Thomas Swan
Model:
CCS 3x2"
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