Picture of SEM - Hitachi SU8010
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AVAILABLE
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Responsibles
1st Responsible:
Peter Blomqvist
Process:
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Description
  • Hitachi SU8010 Cold Field Emission SEM
  • Ultra high resolution with backscatter detection and cold trap, 5 motorized axis with loadlock
  • Mounted on an active vibration canceling system
  • Resolution: 1.0 nm @ 15kV
  • Detectors: In-lens SE & E-T SE, STEM
  • In-situ EBIC & I-V measurements
  • Location: Q260

 

Details
Tool name:
SEM - Hitachi SU8010
Area/room:
Q260: Hitach and Zeiss SEM
Category:
Metrology
Manufacturer:
Hitachi
Model:
SU8010
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Tool Modes
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