Picture of FIB - FEI NanoLab 600
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Peter Blomqvist
Process:
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Description

FEI Nova NanoLab 600. Combined focused ion beam and scanning electron microscope with ultra-high resolution. 3 gas injection sources, W, Au and SiOx. Omniprobe nanomanipulator. Installed 2006. Room Q156, Nano-process lab.

This is the FIB part of the tool in LIMS.

Details
Tool name:
FIB - FEI NanoLab 600
Area/room:
Q156: EBL room
Category:
Focused ion beam
Manufacturer:
FEI
Model:
Nova Nanolab 600
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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