Picture of Sputter - Q150T ES
Current status:
AVAILABLE
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Automated small chamber turbo pumped sputter coater mainly for SEM coating capable of high quality thin films with small grain size.

Materials currently available are Pt:Pd (80:20)

Tool name:
Sputter - Q150T ES
Area/room:
Q258: Aixtron CCS
Category:
Sputtering
Manufacturer:
Quorum
Model:
Q150T ES

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