Picture of EDS - GeminiSEM 500
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Shottky FEG type SEM, model GeminiSEM 500 from Zeiss. The instrument is mainly intended for analytical work such as EDS, EBSD, it is equipped with the following detectors:

-Everhart-Thornley (E-T)

-Inlens

-BSD (6 segment detector)

-STEM

-EDS

-EBSD

Location: Q260

Tool name:
EDS - GeminiSEM 500
Area/room:
Q260: Hitach and Zeiss SEM
Category:
Metrology
Manufacturer:
Zeiss/Oxford Instruments
Model:
Ultim Max 170

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