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| 3D Printer Zortrax M200 | 48 | Special equipment | Martin Magnusson | |
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| 4p probe Lucas Labs Pro4-4400 | 225 | Metrology | Anders Kvennefors | |
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| Aerosol system | 22 | Epitaxy | Bengt Meuller | |
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| ALD - Beneq TFS 200 | 610 | CVD equipment | Anders Kvennefors | André Andersen |
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| ALD - Fiji | 704 | CVD equipment | Anders Kvennefors | Anders Kvennefors |
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| ALD system - Picosun Sunale R-100 | 608 | CVD equipment | Anders Kvennefors | André Andersen |
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| ALD system - Savannah-100 | 606 | CVD equipment | Anders Kvennefors | Anders Kvennefors |
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| Argon milling (Temescal) | 211 | Special equipment | Johan Stjernholm | Anders Kvennefors |
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| Asher - New PlasmaPreen | 205 | Plasma processing | Alex den Ouden | |
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| Bonding machine - K&S 4523 | 12 | Packaging/wire bonding | Alex den Ouden | Sarah McKibbin |
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| Bruker AFM Icon | 300 | Metrology | Peter Blomqvist | Sarah McKibbin |
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| Bruker Dektak XT Stylus Profilometer | 304 | Metrology | Peter Blomqvist | |
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| BSL2 lab LAF bench | 142 | Special equipment | Jason Beech | |
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| Chemical Mechanical Polisher | 51 | Dicing/scribing/polishing | Alex den Ouden | |
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| Critical Point Dryer - K850 | 209 | Special equipment | Alex den Ouden | |
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| Dicer - Disco DAD 3320 | 45 | Dicing/scribing/polishing | Anders Kvennefors | Alex den Ouden |
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| Dishwashing machine | 208 | Special equipment | Emil N G Eriksson | Håkan Lapovski |
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| EBL - Raith 150 | 101 | E-beam lithography | Anders Kvennefors | Alex den Ouden |
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| EBL - Voyager | 44 | E-beam lithography | Anders Kvennefors | Alex den Ouden |
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| EBL - Voyager (Night) | 54 | E-beam lithography | Anders Kvennefors | Alex den Ouden |
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| EBSD - GeminiSEM 500 | 713 | Metrology | Peter Blomqvist | Anders Kvennefors |
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| EDS - GeminiSEM 500 | 712 | Metrology | Peter Blomqvist | Anders Kvennefors |
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| Electrical measurement setup | 27 | Metrology | Claes Thelander | |
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| Ellipsometer - alphaSE | 399 | Metrology | Sarah McKibbin | Peter Blomqvist |
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| Ellipsometer RC2 | 400 | Metrology | Peter Blomqvist | Sarah McKibbin |
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| Etcher APEX SLR Cl-based ICP-RIE – Plasma-Therm | 700 | Plasma processing | Luke Hankin | |
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| Etcher APEX SLR F-based ICP-RIE – Plasma-Therm | 112 | Plasma processing | Luke Hankin | |
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| Etcher RIE - Trion T2 | 224 | Plasma processing | Luke Hankin | Sarah McKibbin |
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| Evaporator - AVAC | 201 | Evaporation | Johan Stjernholm | |
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| Evaporator - Temescal E-Beam | 210 | Evaporation | Johan Stjernholm | |
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| FIB - FEI NanoLab 600 | 103 | Focused ion beam | Peter Blomqvist | Alex den Ouden |
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| Flash Lamp Annealer | 215 | Thermal processing | Alex den Ouden | |
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| Fume hood Acid - YR | 41 | Wet process benches | Natalia Volkova | Emil N G Eriksson |
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| Fume hood acid - ALD | 33 | Wet process benches | Natalia Volkova | Emil N G Eriksson |
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| Fume hood acid - Cluster tool | 34 | Wet process benches | Natalia Volkova | Emil N G Eriksson |
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| Fume hood acid - new EBL | 47 | Wet process benches | Natalia Volkova | Ivan Maximov |
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| Fume hood Gold Plating - YR | 40 | Wet process benches | Natalia Volkova | Emil N G Eriksson |
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| Fume hood solvent - ALD | 32 | Wet process benches | Natalia Volkova | Emil N G Eriksson |
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| Fume hood spinner solvent - YR | 39 | Wet process benches | Natalia Volkova | Emil N G Eriksson |
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| G2V Pico variable solar simulator | 1003 | Metrology | Peter Blomqvist | Magnus Borgström |
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| Hall effect measurement setup | 15 | Metrology | Alex den Ouden | Alex den Ouden |
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| Inca | 21 | Computing | Håkan Lapovski | |
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| LayTec - 3 Lambda | 50 | Metrology | Sungyoun Ju | Sebastian Lehmann |
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| LayTec - Spectrum | 49 | Metrology | Sungyoun Ju | Peter Blomqvist |
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| Mask aligner - Karl Süss MJB 4 DUV | 305 | Photolithography | Sarah McKibbin | Anders Kvennefors |
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| Mask aligner MJB4 (soft UV) | 316 | Photolithography | Sarah McKibbin | Anders Kvennefors |
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| Mask-less Aligner - MLA150 | 317 | Photolithography | Sarah McKibbin | Anders Kvennefors |
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| Microscope - Axio Imager A1m Zeiss | 104 | Metrology | Håkan Lapovski | |
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| Microscope - Axio Imager M1m Zeiss | 207 | Metrology | Håkan Lapovski | |
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| Microscope - Axioplan Zeiss | 17 | Metrology | Håkan Lapovski | |
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| Microscope - Axioskop Zeiss | 10 | Metrology | Håkan Lapovski | |
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| Microscope - Nikon Optiphot | 11 | Metrology | Håkan Lapovski | |
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| Moorfield Nanoetch Tool | 114 | Plasma processing | Sarah McKibbin | Alex den Ouden |
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| MOVPE - Aixtron 200/4 | 601 | Epitaxy | Magnus Borgström | Sungyoun Ju |
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| MOVPE - Aixtron CCS (Cluster) | 707 | Epitaxy | Sebastian Lehmann | Sungyoun Ju |
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| MOVPE - Epiquip | 5 | Epitaxy | Magnus Borgström | Sungyoun Ju |
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| New Bonder - F&S | 88 | Packaging/wire bonding | Alex den Ouden | Sarah McKibbin |
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| NIL 6 inch system - Obducat | 306 | Nanoimprint lithography | Sarah McKibbin | Anders Kvennefors |
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| Off-line EBL | 20 | Computing | Anders Kvennefors | |
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| Oven - EBL | 109 | Thermal processing | Håkan Lapovski | |
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| Oven - EVA | 212 | Thermal processing | Håkan Lapovski | Emil N G Eriksson |
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| Oven - UVL1 | 311 | Thermal processing | Håkan Lapovski | |
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| Oven - UVL2 | 312 | Thermal processing | Håkan Lapovski | Emil N G Eriksson |
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| Ozone cleaner - UVOH 150 | 221 | Special equipment | Alex den Ouden | Ivan Maximov |
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| PECVD - MicroSys 200 | 706 | CVD equipment | Luke Hankin | |
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| PLD - TSST | 720 | Epitaxy | Jonas Johansson | Anders Kvennefors |
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| PL-mapper - Enlitech | 500 | Metrology | Peter Blomqvist | |
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| Probe station - Cascade 11000B | 1001 | Metrology | Anders Kvennefors | Anders Kvennefors |
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| PVE300 – Bentham | 1002 | Metrology | Peter Blomqvist | Magnus Borgström |
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| RTP system - RTP 1200-100 | 204 | Thermal processing | Alex den Ouden | Emil N G Eriksson |
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| Safety Cabinet Mars GS 900 | 609 | Special equipment | Håkan Lapovski | Emil N G Eriksson |
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| Scriber - Karl Süss | 13 | Dicing/scribing/polishing | Alex den Ouden | |
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| Scriber, manual | 14 | Dicing/scribing/polishing | Alex den Ouden | |
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| SEM - FEI NanoLab 600 | 102 | Metrology | Alex den Ouden | Peter Blomqvist |
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| SEM - GeminiSEM 500 | 711 | Metrology | Peter Blomqvist | Anders Kvennefors |
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| SEM - Hitachi SU8010 | 705 | Metrology | Peter Blomqvist | Alex den Ouden |
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| SEM - LEO 1560 | 607 | Metrology | Alex den Ouden | Peter Blomqvist |
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| Sputter - Q150T ES | 709 | Sputtering | Alex den Ouden | Emil N G Eriksson |
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| Sputterer - AJA Orion 5 | 206 | Sputtering | Johan Stjernholm | Emil N G Eriksson |
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| Talbot Displacement Lithography | 8 | Photolithography | Sarah McKibbin | Anders Kvennefors |
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| Tensiometer - Theta Lite | 708 | Metrology | Anders Kvennefors | |
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| Tepla Microwave Plasma System | 115 | Plasma processing | Sarah McKibbin | Alex den Ouden |
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| Vacuum oven 1 | 57 | Thermal processing | Alex den Ouden | Anders Kvennefors |
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| Wet bench acid - EBL | 110 | Wet process benches | Natalia Volkova | Emil N G Eriksson |
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View
| Wet bench acid - EVA | 213 | Wet process benches | Natalia Volkova | Emil N G Eriksson |
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| Wet bench acid - UVL | 313 | Wet process benches | Natalia Volkova | Emil N G Eriksson |
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| Wet bench solvent - Aerotaxy | 37 | Wet process benches | Natalia Volkova | |
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| Wet bench solvent - EBL | 111 | Wet process benches | Natalia Volkova | Emil N G Eriksson |
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| Wet bench solvent - EVA | 214 | Wet process benches | Natalia Volkova | Emil N G Eriksson |
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| Wet bench solvent - new EBL | 46 | Wet process benches | Natalia Volkova | Emil N G Eriksson |
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| Wet bench solvent - UVL1 | 314 | Wet process benches | Natalia Volkova | Emil N G Eriksson |
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| Wet bench solvent - UVL2 | 315 | Wet process benches | Natalia Volkova | Emil N G Eriksson |
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| XRD - Bruker D8 Discover | 605 | Metrology | Peter Blomqvist | Alex den Ouden |