Picture of Flash Lamp Annealer
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The flash lamp annealing system is used to generate ultrashort flashes to heat surfaces. Below the substrate holder, is a lamp heater for preheating the substrates and 2 flash lamps above for short pulse heating. Preheating up to 800 degrees C with flashing up to 4.0kV with pulse duration between 1-10 ms in a controlled vacuum environment.

Installed in EVA Lab.


No combustible materials may be used in the system, samples will be approved on a case-to-case basis.
 

Tool name:
Flash Lamp Annealer
Area/room:
Q158: EVA lab
Category:
Thermal processing
Manufacturer:
Rovak Vakuumtechnik GmbH
Model:
Semi-Line 2.0

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