Picture of EBL - Voyager (Night)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Anders Kvennefors
Process:
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Description

50kV High Speed EBL from Raith Company.

Details
Tool name:
EBL - Voyager (Night)
Area/room:
Q241: New EBL
Category:
E-beam lithography
Manufacturer:
Raith GMBH
Model:
Voyager
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Tool Modes
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