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Ellipsometer - alphaSE (399)
Current status:
AVAILABLE
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1st Responsible:
Sarah McKibbin
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Description
Woollam alpha-SE variable angle spectroscopic ellipsometer
Wavelength range: 390 - 900 nm
Fixed angles: 65, 70 or 75 deg
Max sample size: 6" diameter
Location: Temporarily CBE lab
Details
Tool name:
Ellipsometer - alphaSE
Area/room:
Q231: CMP lab
Category:
Metrology
Manufacturer:
Woollam
Model:
alphaSE
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