Picture of Ellipsometer - alphaSE
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Sarah McKibbin
Process:
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Description
  • Woollam alpha-SE variable angle spectroscopic ellipsometer
  • Wavelength range: 390 - 900 nm
  • Fixed angles: 65, 70 or 75 deg
  • Max sample size: 6" diameter
  • Location: Temporarily CBE lab
Details
Tool name:
Ellipsometer - alphaSE
Area/room:
Q231: CMP lab
Category:
Metrology
Manufacturer:
Woollam
Model:
alphaSE
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