Picture of SEM - Hitachi SU8700
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Responsibles
1st Responsible:
Peter Blomqvist
Process:
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Description
  • Hitachi SU8700 Schottky field emission SEM
  • High resolution SEM: 0.6 nm @ 15 kV and 0.8 nm @ 1 kV
  • Electron detectors: in-lens SE, in-lens BSE, E-T SE, Ultra-Variable Pressure Detector (UVPD) and STEM
  • Variable pressure mode, 5-300 Pa
  • Bruker FlatQUAD EDS detector
  • 6" sample load-lock
  • Location: Q241
Details
Tool name:
SEM - Hitachi SU8700
Area/room:
Q241: New EBL
Category:
Metrology
Manufacturer:
Hitachi
Model:
SU8700
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