Picture of PECVD - SPTS DELTA LPX APM
Current status:
AVAILABLE
Book | Log| 
Show/Collapse all

Responsibles
1st Responsible:
Amirreza Ghassami
Process:
Amirreza Ghassami
Files
You must be logged in to view files.
Description
Details
Tool name:
PECVD - SPTS DELTA LPX APM
Area/room:
Q258: Aixtron CCS
Category:
CVD equipment
Manufacturer:
KLA
Model:
DELTA LPX APM
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
You must be logged in to view tool modes.