Programable vacuum oven that is allowed to run long1 programs. This tool is free, but with obligatory booking.
Leave the tool as clean or cleaner than you found it.
No toxic or corrosive liquids/volatiles allowed.
Flammable liquids or volatiles are only allowed in very small quantities (i.e drying resist, not perfectly dry surface etc.). Inform yourself of flashpoints and autoignition temperatures beforehand!2
Temperature range: room-temperature - 200°C
Pressure range: ~40mbar - 1atm
- You are only allowed to run the oven unsupervised if running a program that ends at (close to) room temperature and is not set to hold temperature (fully shuts of). You should check on it regularly and you must come by at the expected end-time to shut of the nitrogen and vacuum pump.
If you want to run more than 48h, discuss with tool responsible first!
- If something is flammable you must inform yourself of its flash point and first dry it safely below the flash point. Example: PMMA (probably) contains anisole as solvent with a flashpoint of 125°C (NFPA, 2010) so it should be dried below that temperature. Note that flashpoints are different depeding on pressure and if open to the chamber or covered with a slide for example (open resp. closed cup flashpoints). Flashpoint of resist will change as it dries.
Albeit autoignition temperatures are typically above 200°C (maximum of oven) you are not allowed to run any amount of material above its autoignition point.
The tool does not have any cooler so note that cooling times might be longer than you can set them to, especially if running at low pressure. Using temperatrature alarm "auto" can trigger the oven alarm during cooling as the setpoint and actual will not match unless you exactly predicted the cooling rate and should not be used. Instead simply set the over and under temperature limits!