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LPCVD-SVCS (136)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Petter Pettersson
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Description
Details
Tool name:
LPCVD-SVCS
Area/room:
Q243: Pulsed Laser Depo
Category:
Special equipment
Manufacturer:
SVCS
Model:
FUR22403
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