Picture of Aerosol system
Current status:
WARNING
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Responsibles
1st Responsible:
Bengt Meuller
Process:
Files
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Description

Aerosol system. Location: Q247, Berzelius lab.

Details
Tool name:
Aerosol system
Area/room:
Q247: Aerosol Generator
Category:
Epitaxy
Manufacturer:
[Not specified]
Model:
[Not specified]
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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