Picture of Fume hood acid - ALD
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Natalia Volkova
Process:
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Description

Fume hood bench for chemical etching, including HF-etching. Location: Q255, ALD-lab.

Details
Tool name:
Fume hood acid - ALD
Area/room:
Q255: LEO SEM
Category:
Wet process benches
Manufacturer:
[Not specified]
Model:
[Not specified]
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