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Fume hood acid - Cluster tool (34)

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Natalia Volkova

Process:

Files

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Description

Fume hood acid bench, dedicated for acid and base solutions, room Q258, cluster tool lab, Nano-epitaxy lab.

Details

Tool name:

Fume hood acid - Cluster tool

Area/room:

A_Berzelius vent down 2024

Category:

Wet process benches

Manufacturer:

[Not specified]

Model:

[Not specified]

Tool Modes

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