Picture of Oven - EBL
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Håkan Lapovski
Process:
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Description

Oven for baking of e-beam and UV-sensitive resists. Location: EBL-room, NANO-process lab.

Details
Tool name:
Oven - EBL
Area/room:
Q156: EBL room
Category:
Thermal processing
Manufacturer:
Salvis LA from L.A.B. Sweden
Model:
TC40 with exhaust adapter
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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