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Wet bench acid - EBL (110)

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Natalia Volkova

Process:

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Description

Wet bench for chemical etching, including HF-work, Nano-process, EBL-lab, room Q156

Details

Tool name:

Wet bench acid - EBL

Area/room:

Q156: EBL room

Category:

Wet process benches

Manufacturer:

[Not specified]

Model:

[Not specified]

Tool Modes

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