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Wet bench solvent - EVA (214)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Natalia Volkova
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Description
Wet bench for solvents, spin-coating of resists, Nano-process, EVA-lab, room Q158
Details
Tool name:
Wet bench solvent - EVA
Area/room:
Q158: EVA lab
Category:
Wet process benches
Manufacturer:
[Not specified]
Model:
[Not specified]
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