Picture of Ozone cleaner - UVOH 150
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Alex den Ouden
Process:
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Description

UV-ozone cleaning system from FHR Anlagenbau GmbH. Heater temperture up to 250°C. Substrate up to 8". Process in atmospheric pressure. Location: room Q158, NANO-process lab.

Details
Tool name:
Ozone cleaner - UVOH 150
Area/room:
Q158: EVA lab
Category:
Special equipment
Manufacturer:
[Not specified]
Model:
[Not specified]
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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