Picture of Mask aligner - Karl Süss MJB 4 DUV
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Sarah McKibbin
Process:
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Description

DUV contact mask aligner. Wavelenght from 240nm to 260nm. Strongly damped mid-soft UV region. Other parameters like for soft UV MJB4 mask aligner. Location: room Q237 - YR room, Berzelius lab.

Details
Tool name:
Mask aligner - Karl Süss MJB 4 DUV
Area/room:
Q237: YR lab
Category:
Photolithography
Manufacturer:
[Not specified]
Model:
[Not specified]
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