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Chalmers
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Oven - UVL2 (312)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Håkan Lapovski
Process:
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Description
Oven for baking of e-beam and UV-sensitive resists. Location: UVL-room, NANO-process lab.
Details
Tool name:
Oven - UVL2
Area/room:
Q161: UVL lab
Category:
Thermal processing
Manufacturer:
Salvis LA from L.A.B. Sweden
Model:
TC40 with exhaust adapter
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