Picture of MOVPE - Epiquip
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Magnus Borgström
Process:
Files
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Description

MOVPE system for III-V growth. Arsenides and Phosphides. Location: room Q248.

Details
Tool name:
MOVPE - Epiquip
Area/room:
A_Berzelius vent down 2024
Category:
Epitaxy
Manufacturer:
EpiQuip, Epigress
Model:
VP502
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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