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Wet bench solvent - UVL1 (314)

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Natalia Volkova

Process:

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Description

Wet bench for solvents, spin-coating of UV-resists, Nano-process, UVL-lab, room Q161

Details

Tool name:

Wet bench solvent - UVL1

Area/room:

Q161: UVL lab

Category:

Wet process benches

Manufacturer:

[Not specified]

Model:

[Not specified]

Tool Modes

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