Picture of MOVPE - Aixtron 200/4
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Magnus Borgström
Process:
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Description

MOVPE system for III-V growth. Arsenides, Phosphides, and Antimonides. Location: room Q256.

Details
Tool name:
MOVPE - Aixtron 200/4
Area/room:
Q256: Aixtron 200 / XRD
Category:
Epitaxy
Manufacturer:
Aixtron
Model:
200/4
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Instructors

Licensed Users

Tool Modes
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