Picture of ALD system - Savannah-100
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Anders Kvennefors
Process:
Anders Kvennefors
Files
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Description

Atomic Layer Deposition system from Cambridge Nanotech. Deposition of AlOx and HfO high-k dielectric. Installed in room Q255

Details
Tool name:
ALD system - Savannah-100
Area/room:
Q255: LEO SEM
Category:
CVD equipment
Manufacturer:
Cambridge Nanotech
Model:
Savannah 100
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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