Probe station Cascade 11000B for electrical characterization with Keithley 4200A-SCS Parameter Analyzer, Agilent 4294A Precision Impedance Analyzer or your own equipment. ThermoChuck temperature control from -65°C to 150°C. Purge with dry air or nitrogen.
Location: Nano-characterization, room Q261 (outside of Cleanroom, Level 2).