Picture of SEM - LEO 1560
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Thermal Field Emission SEM with a loadlock and a 8" motorized stage, capable of 1nm resolution at 20kV. Located in Q255, 2nd floor of nanolab. For general characterization.

Tool name:
SEM - LEO 1560
Area/room:
Q255: LEO SEM
Category:
Metrology
Manufacturer:
LEO/ZEISS
Model:
1560

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