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SEM - Hitachi SU8010 (705)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Peter Blomqvist
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Description
Hitachi SU8010 Cold Field Emission SEM
High resolution SEM with backscatter detection and cold trap, 5 motorized axis with loadlock
Mounted on an active vibration canceling system
Resolution: 1.0 nm @ 15kV
Detectors: In-lens SE & E-T SE, STEM
In-situ EBIC & I-V measurements
Location: Q260
Details
Tool name:
SEM - Hitachi SU8010
Area/room:
Q260: Hitach and Zeiss SEM
Category:
Metrology
Manufacturer:
Hitachi
Model:
SU8010
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