Picture of SEM - Hitachi SU8010
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Peter Blomqvist
Process:
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Description
  • Hitachi SU8010 cold field emission SEM
  • High resolution SEM with backscatter detection, cold trap and 2" sample load-lock
  • Resolution: 1.0 nm @ 15 kV
  • Detectors: in-lens SE, E-T SE and STEM
  • In-situ EBIC & I-V measurements
  • Mounted on an active vibration cancelling system
  • Location: Q260

 

Details
Tool name:
SEM - Hitachi SU8010
Area/room:
Q260: Hitach and Zeiss SEM
Category:
Metrology
Manufacturer:
Hitachi
Model:
SU8010
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Tool Modes
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