Tools
All tools
Tool status
Info
General documents
Sitemap
User access
Login
NanoLund
Chalmers
Electrum
Ångström
MyFab - The Swedish Micro and Nano Fabrication Network
No access?
Apply for access
here...
Login
U
sername:
P
assword:
Forgot your password?
MOVPE - Aixtron CCS (Cluster) (707)
Current status:
AVAILABLE
Book
|
Log
|
Show/Collapse all
Responsibles
1st Responsible:
Sebastian Lehmann
Process:
Sebastian Lehmann
Files
You must be logged in to view files.
Description
MOVPE Aixtron CCS 18313, part of a cluster tool. Location: room Q252
Details
Tool name:
MOVPE - Aixtron CCS (Cluster)
Area/room:
Q258: Aixtron CCS
Category:
Epitaxy
Manufacturer:
Aixtron
Model:
Aixtron CCS 18313
Instructors & Licensed Users
Instructors
Licensed Users
Tool Modes
You must be logged in to view tool modes.
This may take a while...please wait.
×
User Information
Name:
Telephone:
Mobile:
E-mail:
University/Company:
Laboratory:
Send Message
Subject:
Message:
Send