Picture of MOVPE - Aixtron CCS (Cluster)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Sebastian Lehmann
Process:
Sebastian Lehmann
Files
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Description

MOVPE Aixtron CCS 18313, part of a cluster tool. Location: room Q252

Details
Tool name:
MOVPE - Aixtron CCS (Cluster)
Area/room:
Q258: Aixtron CCS
Category:
Epitaxy
Manufacturer:
Aixtron
Model:
Aixtron CCS 18313
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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