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 NameTool IdCategory1st responsible2nd responsible
View 3D Printer Zortrax M20048Special equipmentMartin MagnussonBengt Meuller
View 4p probe Lucas Labs Pro4-4400225MetrologyAnders Kvennefors 
View Aerosol system22EpitaxyBengt Meuller 
View Aerotaxy G343EpitaxyMartin MagnussonBengt Meuller
View ALD - Beneq TFS 200610CVD equipmentBengt MeullerAnders Kvennefors
View ALD - Fiji704CVD equipmentBengt MeullerAnders Kvennefors
View ALD system - Picosun Sunale R-100608CVD equipmentBengt MeullerGeorge Rydnemalm
View ALD system - Savannah-100606CVD equipmentBengt MeullerGeorge Rydnemalm
View Asher - New PlasmaPreen205Plasma processingAlex den Ouden 
View Bonding machine - K&S 452312Packaging/wire bondingAlex den OudenSarah McKibbin
View Bruker AFM Icon300MetrologyPeter BlomqvistSarah McKibbin
View Bruker Dektak XT Stylus Profilometer304MetrologyPeter Blomqvist 
View Chemical Mechanical Polisher51Dicing/scribing/polishingAlex den Ouden 
View Critical Point Dryer - K850209Special equipmentAlex den Ouden 
View Dicer - Disco DAD 332045Dicing/scribing/polishingAnders KvenneforsAlex den Ouden
View Dishwashing machine208Special equipmentGeorge RydnemalmHåkan Lapovski
View EBL - Raith 150101E-beam lithographyAnders KvenneforsAlex den Ouden
View EBL - Voyager44E-beam lithographyAnders KvenneforsAlex den Ouden
View EBL - Voyager (Night)54E-beam lithographyAnders KvenneforsAlex den Ouden
View EBSD - GeminiSEM 500713MetrologyPeter BlomqvistAnders Kvennefors
View EDS - GeminiSEM 500712MetrologyPeter BlomqvistAnders Kvennefors
View Electrical measurement setup27MetrologyClaes Thelander 
View Ellipsometer - alphaSE399MetrologySarah McKibbinPeter Blomqvist
View Ellipsometer RC2400MetrologyPeter BlomqvistSarah McKibbin
View Etcher APEX SLR Cl-based ICP-RIE – Plasma-Therm700Plasma processingElvedin MemisevicSungyoun Ju
View Etcher APEX SLR F-based ICP-RIE – Plasma-Therm112Plasma processingElvedin MemisevicSungyoun Ju
View Etcher RIE - Trion T2224Plasma processingElvedin MemisevicSarah McKibbin
View Evaporator - AVAC201EvaporationJohan Stjernholm 
View Evaporator - Temescal E-Beam210EvaporationJohan Stjernholm 
View FIB - FEI NanoLab 600103Focused ion beamPeter BlomqvistAlex den Ouden
View Flash Lamp Annealer215Thermal processingAlex den Ouden 
View Fume hood Acid - YR41Wet process benchesNatalia Volkova 
View Fume hood acid - ALD33Wet process benchesNatalia Volkova 
View Fume hood acid - Cluster tool34Wet process benchesNatalia VolkovaGeorge Rydnemalm
View Fume hood acid - new EBL47Wet process benchesNatalia VolkovaIvan Maximov
View Fume hood Gold Plating - YR40Wet process benchesNatalia Volkova 
View Fume hood solvent - ALD32Wet process benchesNatalia VolkovaGeorge Rydnemalm
View Fume hood spinner solvent - YR39Wet process benchesNatalia Volkova 
View G2V Pico variable solar simulator1003MetrologyPeter BlomqvistMagnus Borgström
View Hall effect measurement setup15MetrologyAlex den OudenAlex den Ouden
View HMDS/image reversing oven710Special equipmentAlex den Ouden 
View Inca21ComputingJanne Mårtensson 
View LayTec - 3 Lambda50MetrologySungyoun JuSebastian Lehmann
View LayTec - Spectrum49MetrologySungyoun JuPeter Blomqvist
View Mask aligner - Karl Süss MJB 4 DUV305PhotolithographySarah McKibbinAnders Kvennefors
View Mask aligner MJB4 (soft UV)316PhotolithographySarah McKibbinAnders Kvennefors
View Mask-less Aligner - MLA150317PhotolithographySarah McKibbinAnders Kvennefors
View Microscope - Axio Imager A1m Zeiss104MetrologyHåkan Lapovski 
View Microscope - Axio Imager M1m Zeiss207MetrologyHåkan Lapovski 
View Microscope - Axioplan Zeiss17MetrologyHåkan Lapovski 
View Microscope - Axioskop Zeiss10MetrologyHåkan Lapovski 
View Microscope - Nikon Optiphot11MetrologyHåkan Lapovski 
View Moorfield Nanoetch Tool114Plasma processingSarah McKibbinAlex den Ouden
View MOVPE - Aixtron 200/4601EpitaxyMagnus BorgströmSungyoun Ju
View MOVPE - Aixtron CCS (Cluster)707EpitaxySebastian LehmannSungyoun Ju
View MOVPE - Epiquip5EpitaxyMagnus BorgströmSungyoun Ju
View New Bonder - F&S88Packaging/wire bondingAlex den OudenSarah McKibbin
View NIL 6 inch system - Obducat306Nanoimprint lithographySarah McKibbinAnders Kvennefors
View Nitride epitaxy - ThomasSwan401EpitaxyZhaoxia BiSungyoun Ju
View Off-line EBL20ComputingJanne Mårtensson 
View Oven - EBL109Thermal processingHåkan Lapovski 
View Oven - EVA212Thermal processingGeorge RydnemalmHåkan Lapovski
View Oven - UVL1311Thermal processingHåkan Lapovski 
View Oven - UVL2312Thermal processingGeorge RydnemalmHåkan Lapovski
View Oxidation furnace35Thermal processingSarah McKibbinHåkan Lapovski
View Ozone cleaner - UVOH 150221Special equipmentAlex den OudenIvan Maximov
View PECVD - MicroSys 200706CVD equipmentElvedin MemisevicSungyoun Ju
View PL-mapper - Enlitech500MetrologyPeter Blomqvist 
View Probe station - Cascade 11000B1001MetrologyElvedin MemisevicAnders Kvennefors
View Probestation - Karl Suss42Special equipmentAnders Kvennefors 
View Profiler - Dektak 6M303MetrologyHåkan Lapovski 
View PVE300 – Bentham1002MetrologyPeter BlomqvistMagnus Borgström
View RTP system - RTP 1200-100204Thermal processingAlex den OudenEmil N G Eriksson
View Safety Cabinet Mars GS 900 609Special equipmentHåkan LapovskiGeorge Rydnemalm
View Scriber - Karl Süss13Dicing/scribing/polishingAlex den Ouden 
View Scriber, manual14Dicing/scribing/polishingAlex den Ouden 
View SEM - FEI NanoLab 600102MetrologyAlex den OudenPeter Blomqvist
View SEM - GeminiSEM 500711MetrologyPeter BlomqvistAnders Kvennefors
View SEM - Hitachi SU8010705MetrologyPeter BlomqvistAlex den Ouden
View SEM - LEO 1560607MetrologyAlex den OudenPeter Blomqvist
View Sputter - Q150T ES709SputteringAlex den OudenEmil N G Eriksson
View Sputterer - AJA Orion 5206SputteringJohan StjernholmEmil N G Eriksson
View Talbot Displacement Lithography8PhotolithographySarah McKibbinAnders Kvennefors
View Tensiometer - Theta Lite708MetrologyAnders Kvennefors 
View Tepla Microwave Plasma System115Plasma processingSarah McKibbinAlex den Ouden
View Wet bench acid - EBL110Wet process benchesNatalia Volkova 
View Wet bench acid - EVA213Wet process benchesNatalia Volkova 
View Wet bench acid - UVL313Wet process benchesNatalia VolkovaGeorge Rydnemalm
View Wet bench solvent - Aerotaxy37Wet process benchesNatalia Volkova 
View Wet bench solvent - EBL111Wet process benchesNatalia Volkova 
View Wet bench solvent - EVA214Wet process benchesNatalia Volkova 
View Wet bench solvent - new EBL46Wet process benchesNatalia Volkova 
View Wet bench solvent - UVL1314Wet process benchesNatalia Volkova 
View Wet bench solvent - UVL2315Wet process benchesNatalia Volkova 
View XRD - Bruker D8605MetrologyPeter BlomqvistAlex den Ouden
View YR-Mask aligner - Karl Süss MJB 37PhotolithographySarah McKibbinAnders Kvennefors
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